Fabrication of zipping electrostatic actuators

Electro

2018/12/19This zipping behavior, whereby dielectrophoretic forces retain a bead of liquid dielectric as it amplifies electrostatic zipping, may be called dielectrophoretic liquid zipping (DLZ). Modeling We developed a mathematical model to investigate the effect of the bead of liquid dielectric on the behavior of this system (see the Supplementary Materials). Get price

Zipping dielectric elastomer actuators: characterization

3. Modeling of the zipping actuators The most common approach to model the static displacement of electrostatic actuators as a function of the voltage and the initial conditions involves computing the energy contributions to find Get price

Inkjet Printing of Complex Soft Machines with Densely

2020/09/032.1 Inkjet-Printable Materials for Electrostatic Zipping Actuators To inkjet print stretchable electrostatic zipping actuators, at least three materials are required: 1) a compliant electrode material, 2) an insulating elastomer with both structural and electrical properties, and 3) a sacial material that is used to produce fluidic channels. Get price

Fabrication and dynamic testing of electrostatic actuators

1995/08/01This paper presents the fabrication and testing of electrostatic actuators with p + diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The p + diaphragm is used as a moving electrode, whereas the aluminium layer deposited on #7740 Pyrex glass is used as a fixed electrode. Get price

Electrostatic zipping actuators and their applications to MEMS

To design a cross-bar micro relay, two zipping actuators are combined with a curved bistable switch beam and two contacts. (cont.) The micro relay is monolithically fabricated in silicon using deep reactive ion etching to move laterally in the wafer plane. Get price

Fabrication and dynamic testing of electrostatic actuators

1995/08/01This paper presents the fabrication and testing of electrostatic actuators with p + diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The p + diaphragm is used as a moving electrode, whereas the aluminium layer deposited on #7740 Pyrex glass is used as a fixed electrode. Get price

A cantilever

2006/12/27This paper discussed modeling, design, fabrication and characterization of a new cantilever-type electrostatic zipping actuator. The actuator was designed to achieve high displacements and fabricated using multi-layer polysilicon foundry fabrication process PolyMUMPS. The high out-of-plane displacement is to satisfy the requirements in specific optical applications. In this Get price

Fabrication technique for microelectromechanical systems

Fabrication technique for microelectromechanical systems vertical comb-drive actuators on a monolithic silicon substrate Q. X. Zhang Institute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685 Get price

Electrostatic Zipping Actuators and Their Application to MEMS

Contributions. Design: Starting zone to reduce the pull-in voltage Numerical and analytical modeling: easy and accurate Optimization of the system Specified design for implementation in a relay Fabrication and measurement of the actuator-relay Wet-anisotropically-etched micro relay contact. 4. Background: Electrostatic Actuators. Get price

(PDF) Optimum Design of an Electrostatic Zipper Actuator

We describe a method for predicting the optimal de-sign of an electrostatic zipper actuator. The shape of the zipping beam and the electrode are optimized to maximize the applied force at a given stroke, while sat-isfying fabrication Get price

A STUDY OF WHY ELECTROSTATIC ACTUATION IS

electrostatic actuators can be easily built by many fabrication methods, which are compatible with most CMOS technologies that are employed in order to manufacture modern analog and digital devices. Hence, electrostatic actuators can be packaged with control circuitry or measurement circuitry without Get price

A cantilever

2006/12/27This paper discussed modeling, design, fabrication and characterization of a new cantilever-type electrostatic zipping actuator. The actuator was designed to achieve high displacements and fabricated using multi-layer polysilicon foundry fabrication process PolyMUMPS. The high out-of-plane displacement is to satisfy the requirements in specific optical applications. In this Get price

A cantilever

2006/12/27This paper discussed modeling, design, fabrication and characterization of a new cantilever-type electrostatic zipping actuator. The actuator was designed to achieve high displacements and fabricated using multi-layer polysilicon foundry fabrication process PolyMUMPS. The high out-of-plane displacement is to satisfy the requirements in specific optical applications. In this Get price

Fabrication and operation of an electrostatic actuator for

2013/06/20Vertical electrostatic wedge actuators are described that control nanometer-scale gaps between surfaces. Standard parallel-plate electrostatic actuators become difficult to stabilize across extremely small gaps because the nature of the forces and the force laws that describe them often deviate from a Coulomb's law dependence. In this work, a nanometer-scale air gap between a Get price

[PDF] Design and fabrication of electrostatic actuators with

A novel Microelectromechanical Systems (MEMS) deformable mirror (DM) technology for large, light weight, segmented space telescopes is being proposed. This technology is reported to provide an unprecedented imaging capability in a visible and near infrared spectral range. The MEMS-DM proposed in this paper consists of a continuous membrane mirror supported by electrostatic actuators with Get price

Fabrication of zipping electrostatic actuators incorporating

2021/03/22Abstract. Zipping electrostatic actuators operate by bending flexible electrodes using electrostatic forces. This principle allows the use of a wide range of dielectric and conductive materials. Additive Manufacturing (AM) techniques can be used to fabricate these actuators. Get price

Peristaltic Micropump Electrostatic Zipping Actuation Of A

electrostatic zipping actuators. Figure 2 : (a) Electrostatic zipping profile and (b) diaphragm center deflection of a 12-μm-thick PDMS diaphragm into a chamber with sloped sidewalls. Figure 3 : Three-chamber peristaltic pumping Get price

Circular Plate Electrostatic Zipping Actuator for the Application

This paper presents a proof-of-concept design of a MEMS tunable capacitor for an electromagnetic cavity resonator, by using a circular plate electrostatic zipping actuator. The design, fabrication and mechanical testing of a device containing the actuator and the capacitor will be presented. The testing results are compared with a finite element model using coupled-field analysis with ANSYS. Get price

Electrostatic Actuation

Electrostatic actuation is easy to apply in microdevices because of its compatible fabrication process, the ability to form small air gaps (10 μm), low power consumption, high speed operation, and easy electrical control of various components. An additional advantage is resistance to temperature and humidity changes. Get price

Inkjet Printing of Complex Soft Machines with Densely

machines are inkjet printed using multiple layers of electrode, silicone elastomer, and sacrificial material to create electrostatic zipping actuators and multilevel fluidic channels. c) The slug drive is a printed soft machine which mimics the travelling wave locomotion strategy of slugs, with Get price

Circular Plate Electrostatic Zipping Actuator for the Application

This paper presents a proof-of-concept design of a MEMS tunable capacitor for an electromagnetic cavity resonator, by using a circular plate electrostatic zipping actuator. The design, fabrication and mechanical testing of a device containing the actuator and the capacitor will be presented. The testing results are compared with a finite element model using coupled-field analysis with ANSYS. Get price

A cantilever

2007/01/01This paper discussed modeling, design, fabrication and characterization of a new cantilever-type electrostatic zipping actuator. The actuator was designed to achieve high displacements and fabricated using multi-layer polysilicon foundry fabrication process PolyMUMPS. The high out-of-plane displacement is to satisfy the requirements in specific optical applications. In this Get price

Modeling, fabrication, and demonstration of an electrostatic

Modeling, fabrication and demonstration of an electrostatic actuator with a coplanar pre-charged electrode To cite this article: Hyun-Ho Yang et al 2011 J. Micromech. Microeng. 21 085012 View the article online for updates and Get price

A cantilever

2006/12/27This paper discussed modeling, design, fabrication and characterization of a new cantilever-type electrostatic zipping actuator. The actuator was designed to achieve high displacements and fabricated using multi-layer polysilicon foundry fabrication process PolyMUMPS. The high out-of-plane displacement is to satisfy the requirements in specific optical applications. In this Get price

Fabrication of a MEMS Comb Drive Actuator

Comb Drive Force Theory Adam Banees: Development of a MEMS Comb Drive Actuator 4 𝐹𝐹 𝑒𝑒 = 𝑛𝑛𝜀𝜀 0 ℎ 2𝑔𝑔 𝑉𝑉 2 𝐹𝐹 𝑠𝑠 = 𝑘𝑘 𝑥𝑥 𝑥𝑥= 2𝐸𝐸𝑏𝑏 3ℎ 𝐿𝐿 3 𝑥𝑥 𝑥𝑥= 𝑛𝑛𝜀𝜀 0 𝐿𝐿 3 4𝐸𝐸𝑔𝑔𝑏𝑏 3 𝑉𝑉 Get price

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